0.01%FS Ultra-high Precision
Silicon Resonant Pressure Sensor
QBA/BBA series silicon resonant pressure sensor
The resonant structure of the sensor adopts the tuning fork beam design, and its working mode is in-plane vibration, through electrostatic excitation and capacitance pickup to realize the interaction between the electrical signal and mechanical vibration, and then combined with the closed-loop control circuit to convert the frequency signal output.
This pressure sensor features simple pressure and electrical interfaces that minimize the size of the sensor while maintaining performance. Easily disassembled and installed.
The PID4000 Silicon Resonant Hydrostatic Pressure Sensor is a high precision MEMS pressure sensor. The PID4000 is a high-precision MEMS pressure sensor with a digital output that is quantitatively compensated for the analog signal.
The products are available in a variety of output formats and are equipped with pressure gain calibration, pressure shift calibration, temperature gain calibration, temperature shift calibration, and can be applied in a drone atmospheric data measurement system.
- Range: 140kPa
- Accuracy: ±0.01%FS, ±0.02%FS, ±0.05%FS
- Over Pressure: 3xFS.
- Burst Pressure: 3.5xFS.
- Pressure Type: Absolute
- Temperature Compensation: -55~85℃
- Response Time: <25ms
- Pressure Output: RS-232, RS485, RS422, CAN
- Power Supply:
5V±0.5VDC (Digital Version)
15V±0.5VDC (Analog Version)
6V~24VDC (CAN Version) - Power: ≤ 0.5W (Digital), ≤ 1W (Analog), ≤3W (CAN)
- Long-term Stability: ±0.01%FS, ±0.02%FS
- Measure Media: Dry and Non-corrosive Gas
- Pressure Port: ø3.5mm x 9mm
High-precision silicon resonant pressure sensors, the most accurate MEMS pressure sensors at present, because of its high accuracy, good stability, digital output and other advantages, is widely used in aerospace atmospheric data measurement system and pressure controller and meteorological measurement equipment.
- Accuracy: ±0.01%FS, ±0.02%FS (full temperature zones)
- Range: 140kPa, 280kPa, 350kPa
- Pressure Type: Absolute
- Temperature Compensation: -10~50℃, -40~80℃, -55~85℃
- Response Time: <25ms
- Pressure Output: 30kHz~50kHz
- Temperature Output: 2kHz~15kHz
- Power Supply: 15V±0.5VDC
- Current: ≤30mA
- Stabilization Time: 250ms
- Long-term Stability: ±0.01%FS, ±0.02%FS
- Measure Media: Dry and Non-corrosive Gas
- Burst Pressure: 3.5xFS., 2xFS., 1.5xFS.
- Pressure Port: ø2mm x7 mm
PID4000 Silicon Resonant Hydrostatic Pressure Sensor
Kümago Nexus GmbH
Tel : +49 211 540747 030 Fax : +49 211 540747 14 Mail : info@kuemago.com Addr : Breite Straße 22, 40213 Düsseldorf, Deutschland
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