GCD Isolated Diaphragm for Pressure Sensor
Exceptionally flat, minimal residual stress
Low warping caused by metal forming stress
Uniform axial elasticity
Low hysteresis with high repeatability
For oil-filled MEMS pressure sensor
316L stainless steel and titanium
GCD isolated diaphragms are precision metal components used in oil-filled MEMS pressure sensors. Their primary function is to isolate the pressure-sensitive silicon chip from direct contact with the measured medium, thereby protecting the sensing element and enabling reliable pressure transmission.
The physical properties of the diaphragm have a direct impact on sensor performance. GCD diaphragms are manufactured with exceptionally flat forming and minimal residual stress, effectively avoiding the warping commonly found in conventional metal diaphragms. This results in uniform axial elasticity, low hysteresis, and high repeatability, contributing to stable and accurate pressure measurement.
The diaphragms are available in standard diameters of 12 mm, 18 mm, 18.4 mm, and 32 mm, with typical materials including 316L stainless steel and titanium, making them suitable for a wide range of MEMS pressure sensor designs.
