Core elastic measuring element
Excellent bidirectional linearity
High repeatability and stability
Stress-controlled heat treatment
Standard diameters: 75 mm and 130 mm
Pressure ranges from 10 mbar to 16 bar
MEMS thermal mass flow technology
Flow range: 5 to 500 SLM
Analog or digital output
Unidirectional or bidirectional flow
Fast response and high sensitivity
Stable and reliable performance
MEMS thermal mass flow technology
Flow range: 100 to 3000 SCCM
Analog or digital output
Uni- or bidirectional measurement
Fast response and high sensitivity
Stable and reliable performance
Standard I2C interface
High-precision digital sensor
Temperature calibrated
Without peripheral circuits
MEMS thermopile technology
A 5.5 μ m long-pass filter
TO-46 metal tube shell package