MEMS thermal mass flow technology
Flow range: 5 to 500 SLM
Analog or digital output
Unidirectional or bidirectional flow
Fast response and high sensitivity
Stable and reliable performance
MEMS thermal mass flow technology
Flow range: 100 to 3000 SCCM
Analog or digital output
Uni- or bidirectional measurement
Fast response and high sensitivity
Stable and reliable performance