MEMS thermal mass flow technology
Flow range: 5 to 500 SLM
Analog or digital output
Unidirectional or bidirectional flow
Fast response and high sensitivity
Stable and reliable performance
MEMS thermal mass flow technology
Flow range: 100 to 3000 SCCM
Analog or digital output
Uni- or bidirectional measurement
Fast response and high sensitivity
Stable and reliable performance
Standard I2C interface
High-precision digital sensor
Temperature calibrated
Without peripheral circuits
MEMS thermopile technology
A 5.5 μ m long-pass filter
TO-46 metal tube shell package
PT1000 high-precision senser
Range: –50 °C to +150 °C
20–4 mA analog output
IO-Link interface
Stainless steel housing
Customizable probe length
Accuracy up to ±0.5 °C
+49 211 540747 030
info@kuemago.com
