MFC4000 Gas Mass Flow Controller

The MFC4000 MEMS gas mass flow controller is designed for precise gas flow control in analytical instruments, laboratory equipment, and industrial automation systems. Combining a high-performance MEMS thermal flow sensor with intelligent control electronics, it delivers accurate and stable mass flow measurement and control for a wide range of non-corrosive gases.

Supporting flow ranges from 50 mLn/min to 500 mLn/min, the controller provides a 100:1 turndown ratio, fast response, and excellent repeatability for low flow gas control applications. Both analog and RS485 Modbus interfaces enable seamless integration into PLCs, embedded controllers, and process automation systems.

Its compact form factor, interchangeable process connections, and reliable long-term performance make the MFC4000 an ideal compact mass flow controller for OEM instrumentation, gas analyzers, environmental monitoring equipment, semiconductor manufacturing, biotechnology, and laboratory gas handling systems.