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FS1015E MEMS Mass Flow Sensor
MEMS thermal flow sensing
Flow range up to 150 SLPM
Fast response time
Low pressure drop
Medical and industrial applications
Compact sensor design
The FS1015E MEMS mass flow sensor is designed for accurate gas flow measurement in medical devices, laboratory equipment, and industrial gas systems. Based on advanced MEMS thermal sensing technology, it delivers fast response, high sensitivity, and excellent long-term stability while maintaining very low pressure loss.
With full-scale flow ranges up to 150 SLPM and a 100:1 dynamic range, the sensor is suitable for both low and high flow applications. Its compact design allows easy integration into embedded systems, medical ventilators, anesthesia machines, respiratory equipment, and gas analysis instruments. Standard ISO 15 mm medical connectors are available, while alternative process connections can be provided for OEM applications.
The FS1015E combines reliable MEMS sensing technology with compact packaging, making it an ideal medical mass flow sensor and gas flow sensor for healthcare equipment, laboratory instruments, environmental monitoring, and OEM gas flow measurement solutions.
